Crystal orientation measurement device and the crystal orientation measurement method

摘要

PROBLEM TO BE SOLVED: To determine both of a peripheral direction standard and a slice surface by the measurement of a side surface with respect to a general crystal ingot wherein a crystal surface in a slice surface direction and a crystal surface to be measured in the side surface direction do not cross each other at a right angle.;SOLUTION: A measuring part 3 emitting X-rays to the side surface of a crystal ingot 1 to detect a crystal surface becoming maximum in the intensity of diffracted X-rays to measure the normal line direction thereof and a data processing part 15 for calculating a third crystal surface normal line ho almost parallel to an ω-axis 14 from first and second crystal surface normal lines hi, hn not parallel to each other measured at first and second rotary positions when the crystal ingot 1 is rotated around the ω-axis 14 being the axis thereof according to a spectrum formula by using the azimuth angle difference between the first and second crystal normal lines hi, hn known on polar coordinates wherein the third crystal surface normal line ho is an axis and the elevations of both normal lines hi, hn are provided.;COPYRIGHT: (C)2001,JPO