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Rule the part field which is portion of all field concerning
Rule the part field which is portion of all field concerning
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机译:规定属于所有领域的一部分的部分领域
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摘要
It designates that the method of executing the optical proximity effect revision processing for the mask pattern data which includes dummy pattern efficiently is offered as purpose. Optical proximity effect revision processing method, decides the part territory which is portion of all territory concerning the mask pattern which includes with actual pattern and dummy pattern includes each stage which executes optical proximity effect revision processing limiting to the said part territory.
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