Electret condenser microphone method, method for manufacturing a condenser microphone using the same apparatus and electret

摘要

To electret without difficulty, a dielectric film of a condenser microphone formed by micromachining a silicon substrate is also possible and, countermeasures against the change of the microphone sensitivity caused by the variation in characteristics of components and manufacturing variations to provide is possible, the electret technology novel silicon microphone. Complete the silicon microphone chip is mounted on a mounting board which, in this state, by the corona discharge by the needle electrode 51 of one electret processing separately for the dielectric film on the silicon microphone chip one to implement. By adaptively determined based on the measured result of the electret microphone sensitivity of multiple, electret Ka-ryou the second and subsequent, accurate, and efficiently perform the electret dielectric layer.