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LIGHT-INDUCED DIRECTED SELF-ASSEMBLY OF PERIODIC SUB-WAVELENGTH NANOSTRUCTURES

机译:周期亚波长纳米结构的光诱导定向自组装

摘要

In various exemplary embodiments, the present invention provides a system for the light-induced directed self-assembly (LIDSA) of periodic sub-wavelength nanostructures, including: a light source for delivering a beam of photons; a reaction chamber disposed adjacent to the light source; a gas including one or more precursor materials disposed within the reaction chamber; and a substrate disposed within the reaction chamber, wherein the substrate is positioned and configured to receive the beam of photons; wherein the beam of photons causes a periodic sub-wavelength nanostructure of one or more constituents of the one or more precursor materials to form on a surface of the substrate. In various exemplary embodiments, the present invention also provides an associated method.
机译:在各种示例性实施例中,本发明提供了一种用于周期性亚波长纳米结构的光诱导定向自组装(LIDSA)的系统,该系统包括:用于输送光子束的光源;以及用于发射光子束的光源。与光源相邻设置的反应室;气体,其包括布置在反应室内的一种或多种前体材料;以及设置在反应室内的衬底,其中该衬底被定位并配置为接收光子束;其中光子束使一种或多种前体材料的一种或多种成分的周期性亚波长纳米结构形成在基板的表面上。在各种示例性实施例中,本发明还提供一种相关方法。

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