Characterising circuit cell performance variability in response to pertibations in manufacturing process parameters

摘要

A technique for characterising variation in a performance parameter(s) of circuit cells within a circuit cell library with perturbations in manufacturing process parameters uses a statistical approach whereby the statistical distribution of performance parameter(s) resulting from a joint distribution across manufacturing process parameter space is determined. The perturbation in manufacturing process parameter which results in a characteristic amount of variation is then identified and common sets of such perturbations used to group families of circuit cells together. Families of circuit cells have a correlation in their response to manufacturing process parameter perturbation and this is represented by a correlation matrix. Variation characterising data generated in accordance with the above technique is used to drive electronic design automation tools in integrated circuit design and manufacture.