A dual-phase virtual metrology method is disclosed for considering both promptness and accuracy by generating dual-phase virtual metrology (VM) values, wherein a Phase-I conjecture step emphasizes promptness by immediately calculating the Phase-I virtual metrology value (VMI) of a workpiece once the entire process data of the workpiece are completely collected; and a Phase-II conjecture step intensifies accuracy, which does not re-calculate the Phase-II virtual metrology values (VMII) of all the workpieces in the cassette until an actual metrology value (required for tuning or re-training purposes) of a selected workpiece in the same cassette is collected. Besides, the accompanying reliance index (RI) and global similarity index (GSI) of each VMI and VMII are also generated.
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机译：公开了一种双相虚拟计量方法，用于通过生成双相虚拟计量（VM）值来考虑及时性和准确性，其中，阶段I推测步骤通过立即计算阶段I虚拟计量值来强调及时性（VM I ）工件的完整过程数据全部收集完毕后;第二阶段的推测步骤提高了精度，该方法不会重新计算盒中所有工件的第二阶段的虚拟计量值（VM II ），直到实际的计量值（调整所需）为止（或再培训目的）收集同一盒中的选定工件。此外，还生成了每个VM I 和VM II 的伴随可靠性指数（RI）和全局相似性指数（GSI）。
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