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Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus
Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus
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机译:用于安装用于测试半导体组件的探针的探针插座,探针支架臂和测试设备
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摘要
To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe has a probe needle and an essentially prismatic probe shaft. The probe receptacle comprises a base having a socket opening to receive the prismatic probe shaft, surrounded by a base wall. The base wall comprises at least two base wall segments which can be moved toward one another. A probe holder arm having such a probe receptacle, and test apparatus having at least one probe which has such a probe receptacle are also provided.
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