Self-assembly microstructure with polyimide thin-film elastic joint

摘要

The invention relates to a self-assembly microstructure with a polyimide thin-film elastic joint, which contains at least one stationary part of the microstructure and at least one movable part of the microstructure. An elastic joint located between the stationary part and the movable part is a photosensitive polyimide thin film material. The polyimide elastic joint is contracted after high-temperature reflow process. The surface tension force of cured polyimide can rotate and lift-up the movable part of the microstructure in completion of the self-assembly of the microstructure.