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Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle
Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle
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机译:标线片,用于监视光学系统的设备,用于监视光学系统的方法和制造标线片的方法
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摘要
A reticle has a mask substrate, a test pattern established on the mask substrate having an asymmetrical diffraction grating so as to generate positive first order diffracting light and negative first order diffracting light in different diffraction efficiencies, and a device pattern adjacent to the test pattern established on the mask substrate.
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