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Optical element, method for manufacturing optical element and semiconductor laser device using the optical element
Optical element, method for manufacturing optical element and semiconductor laser device using the optical element
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机译:光学元件,光学元件的制造方法以及使用该光学元件的半导体激光装置
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摘要
The present invention provides an optical element which can reliably acquire a difference of refractive indices between a member under a photonic crystal layer and the crystal layer without using such a stacking technique as in conventional processes; a method for manufacturing the optical element; and a semiconductor laser device with the use of the optical element. The optical element has the first layer 500 and the second layer 400 formed on a substrate 100, wherein the second layer includes pores and has a refractive-index periodically changing structure in which a refractive index periodically changes in an in-plane direction; and the first layer has an oxidized region with a lower refractive index than the refractive index of the second layer, in a lower side of the pores of the second layer.
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