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Energy-filtering cathode lens microscopy instrument

机译:能量过滤阴极透镜显微镜仪

摘要

An energy filtering microscopy instrument is provided. An objective lens is disposed for reception of electrons in order to form an electron diffraction pattern in a backfocal plane of the objective lens. An entrance aperture disposed in the backfocal plane of the objective lens for filtering a slice of the electron diffraction pattern. A magnetic deflector has an entrance plane and an exit plane. The entrance aperture is disposed in the entrance plane. The magnetic deflector is disposed to receive the slice of the electron diffraction pattern and project an energy dispersed electron diffraction pattern to the exit plane. An exit aperture is disposed in the exit plane of the magnetic deflector for selection of desired electron energy of the energy dispersed electron diffraction pattern.
机译:提供了一种能量过滤显微镜仪器。设置物镜以接收电子,以便在物镜的后焦平面上形成电子衍射图。设置在物镜的后焦平面中的入射孔,用于过滤一部分电子衍射图。磁偏转器具有入口平面和出口平面。入口孔布置在入口平面中。布置磁偏转器以接收电子衍射图样的切片并将能量分散的电子衍射图样投射到出射平面。在磁偏转器的出口平面上设置有出口孔,用于选择能量分散的电子衍射图的所需电子能量。

著录项

  • 公开/公告号US7453062B2

    专利类型

  • 公开/公告日2008-11-18

    原文格式PDF

  • 申请/专利权人 RUDOLF M. TROMP;

    申请/专利号US20060364298

  • 发明设计人 RUDOLF M. TROMP;

    申请日2006-02-28

  • 分类号H01J37/05;

  • 国家 US

  • 入库时间 2022-08-21 19:29:52

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