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Magnetoresistive sensor having magnetic layers with tailored magnetic anisotropy induced by direct ion milling

机译:具有磁层的磁阻传感器,该磁层具有通过直接离子铣削感应的特定磁各向异性

摘要

A magnetoresistive sensor having a magnetic anisotropy induced in one or both of the free layer and/or pinned layer. The magnetic anisotropy is induced by a surface texture formed in the surface of the magnetic layer of either or both of the free layer or pinned layer. The surface texture is formed by a direct, angled ion mill performed on the surface of the magnetic layer while holding the wafer on a stationary chuck. By applying this ion milling technique, the magnetic anisotropy of the pinned layer can be formed in a first direction (eg. perpendicular to the ABS) while the magnetic anisotropy of the free layer can be formed perpendicular to that of the pinned layer (eg. parallel to the ABS).
机译:具有在自由层和/或固定层之一或两者中感应的磁各向异性的磁阻传感器。磁各向异性是由在自由层或固定层之一或两者的磁性层的表面中形成的表面纹理引起的。表面纹理是通过在磁性层的表面上进行直角离子铣削而形成的,同时将晶片固定在固定的卡盘上。通过应用这种离子铣削技术,可以沿第一方向(例如,垂直于ABS)形成被钉扎层的磁各向异性,而可以垂直于被钉扎层的磁各向异性形成自由层的磁各向异性(例如,垂直于ABS)。与ABS平行)。

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