manufacturing process of pulsed laser glassy carbon roughness patterns and the roughness pattern obtained from this process

摘要

PROCESS FOR MANUFACTURING RUGOSITY PATTERNS IN PULSE LASER CARBON AND THE RUGOSITY PATTERN OBTAINED FROM THIS PROCESS. The present patent, related to the area of dimensional metrology, relates to a roughness pattern manufacturing process and the patterns manufactured by such a process in which the pulsed laser beam with visible or ultraviolet light is focused on the flat surface of the sample. of monolithic vitreous carbon. Controlling the relative motion between the laser beam and the sample produces, under certain conditions, fairly uniform parallel grooves. This process has the characteristics of fast production, no need to use a special atmosphere or vacuum, no polishing or chemical attacks after irradiation.