Method of Solid phase welding in electrostatic field of silicon-glass-silicon connections

摘要

Solid phase welding in electrostatic field of silicon-glass-silicon connections with change of the polarity during welding. The process is performed by one cycle with guarantee of uniform strength of both silicon-glass welded joints due to connection of silicon membranes with electrodes for application of positive potential, and to the side of glass component clamping electrode for application of negative potential, heating the multilayer connection to the temperature of welding, isothermal holding, successive supply of electrical welding voltage on each of silicon- glass interfaces by switching the positive potential from one silicon membrane to another.