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METHODS OF FABRICATING NANOSTRUCTURES BY USE OF THIN FILMS OF SELF-ASSEMBLING OF DIBLOCK COPOLYMERS, AND DEVICES RESULTING FROM THOSE METHODS
METHODS OF FABRICATING NANOSTRUCTURES BY USE OF THIN FILMS OF SELF-ASSEMBLING OF DIBLOCK COPOLYMERS, AND DEVICES RESULTING FROM THOSE METHODS
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机译:利用双嵌段共聚物自组装薄膜制备纳米结构的方法,以及由这些方法产生的装置
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摘要
Methods for fabricating sublithographic, nanoscale microstructures arrays Including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films ean be used as a template or mask to etch openings in an underlying material layer.
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