ORGANIC PLATINUM COMPLEX AND METHOD FOR PRODUCING PLATINUM-CONTAINING THIN FILM BY CHEMICAL VAPOR DEPOSITION USING THE PLATINUM COMPLEX

摘要

Disclosed is an organic platinum complex which is a novel platinum complex represented by the general formula (1) below. This organic platinum complex has a low melting point, while exhibiting excellent stability against moisture, air and heat. This organic platinum complex is suitable for production of a platinum-containing thin film by a CVD method. (1) (In the formula, X and Y independently represent a linear or branched alkyl group having 1-8 carbon atoms, which may be substituted by an alkoxy group; Z represents a hydrogen atom or a linear or branched alkyl group having 1-4 carbon atoms; and L represents an alkoxyalkenyl group (a linear or branched alkenyl group substituted by an alkoxy group).)