首页> 外国专利> OPTICAL SPATIAL HETERODYNE FOURIER TRANSFORM INTERFEROMETER

OPTICAL SPATIAL HETERODYNE FOURIER TRANSFORM INTERFEROMETER

机译:光学空间异质傅里叶变换干涉仪

摘要

An interferometer and method for interferometric analysis are provided. The methodology includes generating first and second light beams from a light source, interacting the first light beam with an object under inspection, forming, from light emanating from the object under inspection in response to the interacting, an image of the light source on an image sensor, projecting the second light beam on the image on the image sensor, the combination of the light emanating from the object under inspection and the second light beam forming a collective image on the image sensor, applying a Fourier transform to the collective image formed on the image sensor, thereby forming a phase image, and isolating a wavefront map of the object under inspection from within the phase image.
机译:提供了一种干涉仪和用于干涉分析的方法。该方法包括:从光源产生第一和第二光束,使第一光束与被检查物体相互作用,响应于该相互作用,由被检查物体发出的光在图像上形成光源的图像。传感器,将第二光束投射在图像传感器上的图像上,从被检查物体发出的光与在图像传感器上形成集体图像的第二光束的组合,对在其上形成的集体图像进行傅立叶变换图像传感器,从而形成相位图像,并从相位图像中隔离被检查物体的波前图。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号