首页> 外国专利> HEXAGONAL WURTZITE TYPE SINGLE CRYSTAL, PROCESS FOR PRODUCING THE SAME, AND HEXAGONAL WURTZITE TYPE SINGLE CRYSTAL SUBSTRATE

HEXAGONAL WURTZITE TYPE SINGLE CRYSTAL, PROCESS FOR PRODUCING THE SAME, AND HEXAGONAL WURTZITE TYPE SINGLE CRYSTAL SUBSTRATE

机译:六角形纤锌矿型单晶,制备方法和六角形纤锌矿型单晶基体

摘要

Provided is a single crystal with a hexagonal wurtzite structure which is useful as a substrate for various devices and has high purity and is uniform. The single crystal with a hexagonal wurtzite structure, which is obtained by a crystal growth on at least an m-plane of a columnar seed crystal and represented by AX (A representing an electropositive element and X representing an electronegative element) is characterized in that a variation in the concentration of a metal other than the electropositive element A and having a concentration of 0.1 to 50 ppm is within 100%.
机译:提供具有六方纤锌矿结构的单晶,其可用作各种器件的基板并且具有高纯度并且均匀。 表征了六方纤锌矿结构的单晶,其通过在柱状晶种的至少m面上的晶体生长而获得,并且由AX表示(A表示正电元素,X表示负电元素)。除了电正性元素A以外,浓度为0.1〜50ppm的金属的浓度变化在100%以内。

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