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Hexagonal Wurtzite Type Single Crystal, Process For Producing The Same, And Hexagonal Wurtzite Type Single Crystal Substrate

机译:六角纤锌矿型单晶,其制备方法以及六角纤锌矿型单晶基板

摘要

Provided is a single crystal with a hexagonal wurtzite structure which is useful as a substrate for various devices and has high purity and is uniform. The single crystal with a hexagonal wurtzite structures which is obtained by a crystal growth on at least an m-plane of a columnar seed crystal and represented by AX (A representing an electropositive element and X representing an electronegative element) is characterized in that a variation in the concentration of a metal other than the electropositive element A and having a concentration of 0.1 to 50 ppm is within 100%.
机译:提供具有六方纤锌矿结构的单晶,其可用作各种器件的基板并且具有高纯度并且均匀。通过在柱状晶种的至少m面上进行晶体生长而得到的,具有六方纤锌矿结构的单晶,其特征在于,以AX(A为正电元素,X为负电元素)表示。除正电性元素A以外的金属的浓度为0.1〜50ppm的情况下,其浓度在100%以内。

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