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METHOD FOR FORMING BIT LINE CONTACTS AND BIT LINES DURING THE FORMATION OF A FLASH MEMORY DEVICE, AND DEVICES INCLUDING THE BIT LINES AND BIT LINE CONTACTS
METHOD FOR FORMING BIT LINE CONTACTS AND BIT LINES DURING THE FORMATION OF A FLASH MEMORY DEVICE, AND DEVICES INCLUDING THE BIT LINES AND BIT LINE CONTACTS
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机译:在闪存器件形成期间形成位线接触和位线的方法,以及包括位线和接触线的设备
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摘要
A method used during manufacture of a semiconductor device comprises forming first and second bit lines at different levels. Forming the bit lines at different levels increases processing latitude, particularly with regard to spacing between the bit lines which, with conventional processes, may strain photolithograpic limits. A semiconductor device formed using the method, and an electronic system comprising the semiconductor device, are also described.
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