首页> 外国专利> METHOD FOR FORMING BIT LINE CONTACTS AND BIT LINES DURING THE FORMATION OF A FLASH MEMORY DEVICE, AND DEVICES INCLUDING THE BIT LINES AND BIT LINE CONTACTS

METHOD FOR FORMING BIT LINE CONTACTS AND BIT LINES DURING THE FORMATION OF A FLASH MEMORY DEVICE, AND DEVICES INCLUDING THE BIT LINES AND BIT LINE CONTACTS

机译:在闪存器件形成期间形成位线接触和位线的方法,以及包括位线和接触线的设备

摘要

A method used during manufacture of a semiconductor device comprises forming first and second bit lines at different levels. Forming the bit lines at different levels increases processing latitude, particularly with regard to spacing between the bit lines which, with conventional processes, may strain photolithograpic limits. A semiconductor device formed using the method, and an electronic system comprising the semiconductor device, are also described.
机译:在半导体器件的制造期间使用的方法包括以不同的水平形成第一位线和第二位线。在不同水平上形成位线增加了处理的自由度,特别是在位线之间的间隔方面,这对于传统工艺而言可能使光刻极限变得紧张。还描述了使用该方法形成的半导体器件以及包括该半导体器件的电子系统。

著录项

  • 公开/公告号KR20090006165A

    专利类型

  • 公开/公告日2009-01-14

    原文格式PDF

  • 申请/专利权人 MICRON TECHNOLOGY INC.;

    申请/专利号KR20087027010

  • 发明设计人 ARITOME SEIICHI;

    申请日2008-11-04

  • 分类号H01L27/115;H01L21/8247;H01L29/786;H01L27/02;

  • 国家 KR

  • 入库时间 2022-08-21 19:14:11

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