POROUS THIN FILM AND THE FABRICATION METHOD THEREOF

摘要

A manufacturing method of a porous thin film is provided to enable the porous thin film to be applied to an SOFC(Solid Oxide Fuel Cell) operated at high temperatures, and to obtain excellent adhesion with a substrate by manufacturing a porous thin film having a porous structure even at high temperatures, and the porous thin film manufactured by the same is provided. A manufacturing method of a porous thin film comprises: depositing reactive gas together with a thin film material using a thin film deposition process to form a thin film; removing the reactive gas from the thin film through heat treatment; and crystallizing the thin film to obtain a porous thin film. The thin film deposition process is one selected from sputtering, vapor deposition, ion plating, and PLD(Pulsed Laser Deposition) methods.