DEVICE FOR VACUUM LEAK TEST OF FEED-THROUGH AND METHOD OF VACUUM LEAK TEST USING THE DEVICE

摘要

An apparatus and a method for detecting vacuum leakage of a feed-through are provided to detect vacuum leakage of the feed-through and easily repair a portion of the feed-through at which vacuum leakage is generated. A feed-through vacuum leakage detecting apparatus includes a sealing unit(210), a gas storage unit(220), a pumping unit(230), and an inspection unit(240). The sealing unit seals up one end of each of a plurality of tubes(110). The gas storage unit surrounds the other end of each tube. The pumping unit vacuumizes the inside of the gas storage unit. The inspection unit measures the quantity of gas filled in the gas storage unit.