Device for vacuum leak test of Feed-Through and method of vacuum leak test using the device

摘要

vacuum equipment devices that can be tested for vacuum leaks before feedthrough feedthrough mounted on and using the same the disclosure with respect to the vacuum leak test method . ; vacuum leak testing apparatus of the feed -through (Feed-Through) a plurality of tubes formed through the flange (Flange) according to the invention the plurality of tubes seal to seal a respective one end ; The surround the plurality of tubes each of the other side end of the gas storage portion ; Part of the interior of the vacuum pump exhaust gas storage; And having a checking is made by measuring the amount of gas inside the gas storage unit .