首页> 外国专利> APPARATUS AND METHOD OF CONTAMINATING CU FOR IDENTIFYING CRYSTAL DEFECT REGION

APPARATUS AND METHOD OF CONTAMINATING CU FOR IDENTIFYING CRYSTAL DEFECT REGION

机译:用于识别晶体缺陷区域的污染铜的装置和方法

摘要

Determining copper provides the method for contamination device and defective area grade. Copper polluting device according to the present invention, BOE (buffered oxide etch agent) and supply drugs supply copper solution, sinking sample preparation receives supply from drugs supply BOE solution and copper (sinking) to the pollution of copper Cu-W ore deposit bathtub (bathtub) in Cu-W ore deposit solution, copper Cu-W ore deposit is used to dry first with pure water cleaning and drying unit under bathtub in the washing of contaminated samples, pure water cleaning and drying unit for first is from for blowing compressed air, and the second drying unit of Cu-W ore deposit bathtub receives sample, the pure water washed, dry primary portion, it is dry that one robot transmits a sample portion secondary.
机译:确定铜为污染设备和缺陷区域等级提供了方法。根据本发明的铜污染装置,BOE(缓冲氧化物蚀刻剂)和药物供应的铜溶液供应,下沉的样品制备从药物供应的BOE溶液和铜的供应(下沉)的污染对铜Cu-W矿床的沉积铜(浴缸)在铜钨矿床溶液中,铜铜钨矿床首先在浴缸下的纯净水清洗干燥单元中用于干燥被污染的样品,首先将纯净水清洗干燥单元用于吹制压缩空气,Cu-W矿床的第二个干燥单元接收样品,将纯净水洗净,干燥一次部分,一个机器人将二次样品部分干燥。

著录项

  • 公开/公告号KR20090047580A

    专利类型

  • 公开/公告日2009-05-13

    原文格式PDF

  • 申请/专利权人 SILTRON INC.;

    申请/专利号KR20070113487

  • 发明设计人 LEE SEUNG WOOK;KIM KWANG SALK;

    申请日2007-11-08

  • 分类号H01L21/66;H01L21/20;

  • 国家 KR

  • 入库时间 2022-08-21 19:13:30

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