FABRICATION METHOD OF NANO-DOTS ARRAY USING ATOMIC LAYER DEPOSITION AND SENSOR INCLUDING THE NANO-DOTS ARRAY

摘要

A fabrication method of nano-dots array using atomic layer deposition and a sensor including the nano-dots array are provided to uniformly manufacture the nano-dot array using a porosity nano template. A substrate(302) in which a porosity nano template(300) is arranged is provided to the inside of reaction chamber. The porosity nano template comprises the air bubble of the cylinder type which is formed by using the triblock copolymer. The first bubbler including the first precursor is set up to the temperature range in advance. The second bubbler including the second precursor is set up to the temperature range in advance. The first precursor and the second precursor are successively supplied to the reaction chamber. The first precursor and the second precursor successively react on the substrate surface exposed inside the air bubble.