首页> 外国专利> FLOW CONTROLLER, FLOW MEASURING DEVICE TESTING METHOD, FLOW CONTROLLER TESTING SYSTEM, AND SEMICONDUCTOR MANUFACTURING APPARATUS

FLOW CONTROLLER, FLOW MEASURING DEVICE TESTING METHOD, FLOW CONTROLLER TESTING SYSTEM, AND SEMICONDUCTOR MANUFACTURING APPARATUS

机译:流量控制器,流量测量装置测试方法,流量控制器测试系统和半导体制造装置

摘要

A testing method for testing a flow controller with high accuracy by shortening the time required for the test including the waiting time as much as possible. A flow controller (4) under test and a flow controller (5) used as a reference are arranged in order of mention in series from the upstream side in the channel through which a fluid the flow of which is to be controlled flows. The valve of the flow controller (4) is substantially fully opened into to bring it to a flow uncontrolled state, and the flow of the fluid is controlled to a predetermined flow by the flow controller (5). It is judged whether or not the actually measured flowmeasured by the flow controller (4) is within a predetermined range of the actually measured flow measured by the flow controller (5). ® KIPO & WIPO 2009
机译:一种通过尽可能缩短包括等待时间的测试所需时间来高精度测试流量控制器的测试方法。被提及的流量控制器(4)和用作基准的流量控制器(5)从流道的上游侧开始依次排列,要控制流量的流体流过该通道。流量控制器(4)的阀基本上完全打开以使其处于流量不受控制的状态,并且流量控制器(5)将流体的流量控制为预定流量。判断由流量控制器(4)测量的实际测量流量是否在由流量控制器(5)测量的实际测量流量的预定范围内。 ®KIPO和WIPO 2009

著录项

  • 公开/公告号KR20090086936A

    专利类型

  • 公开/公告日2009-08-14

    原文格式PDF

  • 申请/专利权人 HORIBA STEC CO. LTD.;

    申请/专利号KR20097005173

  • 发明设计人 YASUDA TADAHIRO;

    申请日2007-12-05

  • 分类号G05D7/00;G05D7/03;

  • 国家 KR

  • 入库时间 2022-08-21 19:12:49

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