首页> 外国专利> FLOW CONTROLLER, FLOW MEASURING DEVICE TESTING METHOD, FLOW CONTROLLER TESTING SYSTEM, AND SEMICONDUCTOR MANUFACTURING APPARATUS

FLOW CONTROLLER, FLOW MEASURING DEVICE TESTING METHOD, FLOW CONTROLLER TESTING SYSTEM, AND SEMICONDUCTOR MANUFACTURING APPARATUS

机译:流量控制器,流量测量装置测试方法,流量控制器测试系统和半导体制造装置

摘要

latency also reduces the time required to test as much as possible , including precision nice black ( ) a provides a test method of the flow control device that can be carried . To this end , in the flow rate is controlled fluid flow passage , the flow control device is a black target 4 and | a flow control device (5) as a reference , By providing in series in this order from the upstream , the black a flow rate control device 4 is the target of the valve about the deployment ( ) flow rate in the state ratio ( ) and at the same time as the control condition , a predetermined flow rate by the flow rate of the fluid flow control device 5 which is the reference with the measured flow rate by the control state , and flow rate control device 4, which is in the black target , and to determine whether they are within a predetermined range of the measured flow rate by the flow rate control device (5) which is the reference .
机译:延迟还可以尽可能地减少测试所需的时间,其中包括精确度不错的black()提供了一种可以随身携带的流量控制设备的测试方法。为此,在流量被控制的流体流动通道中,流量控制装置为黑色目标4,并且|以流量控制装置(5)为基准,通过从上游开始依次设置黑色,流量控制装置4成为阀以在状态比率()下展开()流量为目标。在控制条件的同时,将以流体流量控制装置5的流量为基准的预定流量和以控制状态下的测定流量作为基准的流量以及流量控制装置4为黑色。目标,并通过作为基准的流量控制装置(5)确定它们是否在测得的流量的预定范围内。

著录项

  • 公开/公告号KR101444964B1

    专利类型

  • 公开/公告日2014-09-26

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20097005173

  • 发明设计人 야스다 다다히로;

    申请日2007-12-05

  • 分类号G05D7/00;G05D7/03;

  • 国家 KR

  • 入库时间 2022-08-21 15:40:01

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