首页> 外国专利> FLOW CONTROLLER, FLOW MEASURING DEVICE TESTING METHOD, FLOW CONTROLLER TESTING SYSTEM, AND SEMICONDUCTOR MANUFACTURING APPARATUS

FLOW CONTROLLER, FLOW MEASURING DEVICE TESTING METHOD, FLOW CONTROLLER TESTING SYSTEM, AND SEMICONDUCTOR MANUFACTURING APPARATUS

机译:流量控制器,流量测量装置测试方法,流量控制器测试系统和半导体制造装置

摘要

A testing method for testing a flow controller with high accuracy by shortening as much as possible the time required for the test including the wait time. A testing-subject flow controller and a testing-standard flow controller are arranged in that order in series from the upstream side in a flow channel through which a fluid whose flow is to be controlled flows. In a flow-uncontrolled state in which the valve of the testing-subject flow controller is practically in the full-open state, and with the fluid flow controlled to a predetermined flow rate by the testing-standard flow controller, whether the actual flow-rate measurement according to the testing-subject flow controller falls within a predetermined range of actual flow-rate measurements according to the testing-standard flow controller is determined.
机译:一种通过尽可能缩短包括等待时间在内的测试所需时间来高精度测试流量控制器的测试方法。在流道中,从上游侧起依次布置有被检体流量控制器和检测标准流量控制器,要控制其流量的流体流过该流道。在流量不受控制的状态下,其中测试对象流量控制器的阀实际上处于全开状态,并且在通过测试标准流量控制器将流体流量控制到预定流量的情况下,实际流量是否根据测试对象流量控制器的流量测量值落在根据测试标准流量控制器确定的实际流量测量值的预定范围内。

著录项

  • 公开/公告号US2010145633A1

    专利类型

  • 公开/公告日2010-06-10

    原文格式PDF

  • 申请/专利权人 TADAHIRO YASUDA;

    申请/专利号US20070517796

  • 发明设计人 TADAHIRO YASUDA;

    申请日2007-12-05

  • 分类号G01F25/00;G06F19/00;

  • 国家 US

  • 入库时间 2022-08-21 18:52:16

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