Microwave plasma nozzle with enhanced plume stability and heating efficiency, plasma generating system and method thereof

摘要

The present invention relates to a microwave plasma generation system and method. The present invention arranged in a microwave plasma nozzle 26 and the gas flow tube 40 including a gas flow tube 40 is provided with a first end 33 near the discharge portion of the gas flow tube 40, the rod-shaped conductor (34 ) it provides. Portion 35 of the rod-shaped conductor (34) extends into the microwave cavity 24 for receiving the microwaves transmitted through the cavity (24). In order to heat the gas into plasma receiving micro waves it is focused on the reception of the first end (33). Further, the microwave plasma nozzle (26) is a vortex guide 36 between the rod-shaped conductors 34 and the gas flow tube 40 to divide the gas flowing through the gas flow tube 40 in a spiral-like flow direction It included. In addition, the microwave plasma nozzle 26 includes a shield mechanism 108 for reducing a microwave power loss which passes through the gas flow pipe (40). ; Plasma, microwave plasma, nozzles, gas plumes