A Method to Construct Plasma with Nonlinear Density Enhancement Effect in Multiple Internal Inductively Coupled Plasmas

摘要

A method is proposed to built up plasma based on a nonlinear enhancement phenomenonof plasma density with discharge by multiple internal antennas simultaneously. It turnsout that the plasma density under multiple sources is higher than the linear summation of thedensity under each source. This effect is helpful to reduce the fast exponential decay of plasmadensity in single internal inductively coupled plasma source and generating a larger-area plasmawith multiple internal inductively coupled plasma sources. After a careful study on the balancebetween the enhancement and the decay of plasma density in experiments, a plasma is builtup by four sources, which proves the feasibility of this method. According to the method, moresources and more intensive enhancement effect can be employed to further build up a high-density,large-area plasma for different applications.