Spectral analyzer for measuring the thickness and identification of chemicals of organic thin films using CARS microscopy

摘要

The present invention relates to a spectral analyzer using a CARS microscopy which can measure the thickness and identification of kinds of chemicals of organic thin films at high spatial precision using a non-destructive method. The spectral analyzer using the CARS microscopy according to the present invention measures the wavelength and intensity of the coherent anti- stakes Raman scattering (CARS) signals scattered by irradiating stokes beam and pump beam to the thin films to measure the thickness of the thin films and to analyze the chemicals. The spectral analyzer using the CARS microscopy according to the present invention is based on a vacuum spectroscopy corresponding to a vibration mode of a molecule by using a CARS microscopy that is one of third-order non- linear optical phenomenons, making it possible to analyze each component, measure the components non- invasive Iy and in real time, and overcome a general diffraction limitation of spatial resolution.