A vacuum coating installation for the coating of longitudinally extending substrates

摘要

Vacuum deposition apparatus for coating elongated substrates with one or more coating sections and one or more pump sections, with at least one magnetron in an arrangement as a sputtering - up - variant below of the substrate with a target surface facing the bottom of the substrate and a transport device, characterized in that the transport means (9) in a drive plane (10) and in a transport plane (11) is arranged divided, wherein the drive coupling plane (10) is arranged so that the underside of the magnetron (4) containing a magnetron body above the drive coupling (10) is.