Method and apparatus for downstream gas dissociation

摘要

A system for exciting of gases, comprising:a remote plasma source for generating a plasma region in a kammner, wherein the plasma gas is produced an activated;a supply source for the insertion of a downstream - gas, in order with the activated gas outside the plasma region, whereby the activated gas excitation of the downstream - gas conveys and wherein the excited downstream - gas is not considerably interacts with an inner surface of the chamber; anda feature for providing a gap between a outlet flange of the chamber and the supply source.