首页> 外国专利> Holding device for use in coordinates-measuring device, has supporting points for two-dimensional substrate such that supporting points carry two-dimensional substrate, where substrate is force-freely held with objects

Holding device for use in coordinates-measuring device, has supporting points for two-dimensional substrate such that supporting points carry two-dimensional substrate, where substrate is force-freely held with objects

机译:用于坐标测量装置的保持装置具有用于二维衬底的支撑点,使得支撑点承载二维衬底,其中衬底与物体自由地保持力。

摘要

The device (20) has supporting points (121) for a two-dimensional substrate (2) such that the supporting points carry the substrate, which is force-freely held with objects (3). A medium (125) e.g. mercury, is provided in a container (130) for force-free holding of the substrate. The container has an opening to receive the substrate. An intermediate element is formed as one-part intermediate element and arranged between the substrate and medium such that direct contact between the substrate and the medium is absent. The element has a membrane made of flexible material e.g. rubber.
机译:装置(20)具有用于二维基板(2)的支撑点(121),使得支撑点支撑基板,该基板被物体(3)自由地保持。介质(125),例如在容器(130)中提供了汞,用于无力地固定衬底。容器具有开口以接收基板。中间元件形成为单部分的中间元件,并且布置在基底和介质之间,使得基底和介质之间不存在直接接触。该元件具有由柔性材料制成的膜,例如柔性的。橡胶。

著录项

  • 公开/公告号DE102007037705A1

    专利类型

  • 公开/公告日2009-02-12

    原文格式PDF

  • 申请/专利权人 VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH;

    申请/专利号DE20071037705

  • 发明设计人 WIENECKE JOACHIM;

    申请日2007-08-09

  • 分类号G12B5/00;G01B21/04;G01B11/03;

  • 国家 DE

  • 入库时间 2022-08-21 19:09:39

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