Micromachining such as cleaning or modifying of body/powder layer with high-brilliance laser, comprises subjecting a surface of the body/powder layer with focused laser beams over beam switch, galvoscanner, line scanner and focusing optics

摘要

The method for micromachining such as cleaning or modifying of a body (5) or a powder layer (6) with high-brilliance laser (1), comprises subjecting a surface of the body or powder layer with focused laser beams over a beam switch (2), galvoscanner (3), line scanner and focusing optics, which are arranged in the radiation path with respect to the laser with an average output of = 1 KW. The laser beams are diverted by the line scanner. Line change takes place by the galvoscanners, where the focused laser beam with a diameter of smaller than 100 mu m has a speed of greater than 50 m/s. The method for micromachining such as cleaning or modifying of a body (5) or a powder layer (6) with high-brilliance laser (1), comprises subjecting a surface of the body or powder layer with focused laser beams over a beam switch (2), galvoscanner (3), line scanner and focusing optics, which are arranged in the radiation path with respect to the laser with an average output of = 1 KW. The laser beams are diverted by the line scanner. Line change takes place by the galvoscanners, where the focused laser beam with a diameter of smaller than 100 mu m has a speed of greater than 50 m/s. Three-dimensional structures are produced by repeated successive line changes. An independent claim is included for device for micromachining of a body or a powder layer with a laser.