首页> 外国专利> Constructing microstructured bodies e.g. tubes or gratings comprises crushing substrate or powder-containing substrate with pulsed and focused laser beams for generating cavities with melt edges, and applying powder for filling cavities

Constructing microstructured bodies e.g. tubes or gratings comprises crushing substrate or powder-containing substrate with pulsed and focused laser beams for generating cavities with melt edges, and applying powder for filling cavities

机译:构造微结构体,例如管或光栅包括用脉冲激光束和聚焦的激光束破碎基板或含粉末的基板,以产生具有熔化边缘的型腔,并施加粉末填充型腔

摘要

The method comprises crushing a substrate or a powder-containing substrate with pulsed and focused laser beams from a laser for generating a row of cavities with melt edges, applying powder for filling the cavities, and further crushing the powder substrate with the pulsed and focused laser beams until microstructured bodies are formed. A constant pulse rate of the laser beam depends on a deflection velocity and phase constant of incident laser pulse for touching or overlapping the cavities. The method comprises crushing a substrate or a powder-containing substrate with pulsed and focused laser beams from a laser for generating a row of cavities with melt edges, applying powder for filling the cavities, and further crushing the powder substrate with the pulsed and focused laser beams until microstructured bodies are formed. A constant pulse rate of the laser beam depends on a deflection velocity and phase constant of incident laser pulse for touching or overlapping the cavities. Focusing and pulse energy focal and pulse length are selected so that the removal of the substrate is carried out to produce the cavity. The laser beam has the pulses energy of 22-30 J/cm 2 and a pulse duration of 200 nano second. A distance of touching or overlapping cavities with melt edges is 77-100% of a foal diameter of the laser beam. The constant pulse rate is measured by a phase shift between the laser pulse rate and the pulse frequency. The powder is applied by a nozzle or a blade so that powder in the cavity is applied continuous powder beam.
机译:该方法包括用来自激光器的脉冲聚焦激光束破碎衬底或含粉末的衬底,以产生具有熔融边缘的一排空腔,施加粉末以填充空腔,并进一步用脉冲聚焦激光破碎粉末衬底。直到形成微结构体。激光束的恒定脉冲率取决于用于接触或重叠腔的入射激光脉冲的偏转速度和相位常数。该方法包括用来自激光器的脉冲聚焦激光束压碎基板或含粉末的基底,以产生一行具有熔融边缘的腔;施加粉末以填充腔,并用脉冲聚焦激光压碎粉末基底。直到形成微结构体。激光束的恒定脉冲率取决于用于接触或重叠空腔的入射激光脉冲的偏转速度和相位常数。选择聚焦和脉冲能量聚焦和脉冲长度,以便进行衬底的去除以产生腔。激光束的脉冲能量为22-30 J / cm 2>,脉冲持续时间为200纳秒。具有熔融边缘的接触或重叠腔的距离为激光光束的小直径的77-100%。恒定脉冲率通过激光脉冲率和脉冲频率之间的相移来测量。通过喷嘴或刀片施加粉末,从而在腔中施加连续的粉末束。

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