Laser array for processing substrate having laser beam, comprises laser beam source to generate laser beam, fiber-optic probe to couple laser beam in multimode optical fiber, and focusing optics to focus laser beam in working plane

摘要

The laser array comprises: a laser beam source (2) for generating a laser beam (L); a fiber-optic probe (4) for coupling the laser beam in a multimode optical fiber (6) whose fiber core comprises a cross-section different from a circular geometry; and focusing optics subordinated from the multimode optical fiber for focusing the laser beam in a working plane (8). The laser beam source is a solid state laser having a rod-shaped laser-active medium. The fiber core of the multimode optical fiber comprises a rectangular cross-section.