Focused Ion Beam Imaging Of Laser Ablation Sub-surface Effects On Layered Materials

摘要

The focussed ion beam (FIB) represents a useful and versatile tool to allow visualization of sub-surface features related to the thermal effects of laser-target interaction with high spatial resolution. The possibility of performing a contamination-free milling process on specific sample locations provides significant advantage over conventional metallurgical procedures involving cutting and polishing. In particular, the direct visualization of the thermal features occurring at fluences below the phase explosion allows a deeper understanding of the extension of the laser heat-affected zone, the sub-surface alloying processes and additional features related to the photo-thermal mechanism of laser ablation.