Micromechanical electrode structure, corresponding production process and micro actuator device

摘要

The present invention creates a micromechanical electrode structure, a corresponding production process and a microwave generator of the connection device. The electrode structure comprises a stationary electrode arrangement (f) and a deflectable electrode arrangement (d); wherein the fixed electrode arrangement (f) a first base plate (1a; 1b) and at least one rib provided thereon first electrodes (2a - 2f); wherein the deflectable electrode arrangement (d) a first beam (5), to which a first plurality of electrode fingers (5a - 5h; 5a '', 5b - 5f, 5f) is provided which, by means of a second beam (15; 25) are connected to one another; wherein the electrode fingers (5a - 5h; 5a'', 5b - 5f, 5f), the first beam (5) and the second beam (15; 25) a corresponding first number of openings (o1 - o6) define and wherein the fixed electrode arrangement (f) and the deflectable electrode arrangement (d) are arranged in such a way that each first electrodes rib (2a - 2f) to a corresponding opening (o1 - o6) and which is oriented in the case of a deflection of the deflectable electrode arrangement (d) changes the orientation.