Monolithically integrated photodetector array device with ROIC for laser radar image signal and method of making the same

摘要

A monolithically integrated, integrated read-out circuit (ROIC) integrated photodetector array device for a laser radar image signal and a method of fabricating the same are provided. The photodetector array IC for a laser radar image signal comprises: a plurality of photodetection pixels each having a photodiode for converting the energy of incident light into electrical energy and a first heterojunction bipolar transistor for selecting the electric power of the photodiode in the photodiode Line of the photodiode array and a second heterojunction bipolar transistor for selecting the output of the electrical signals that are transmitted from the photodetector in the column of the photodiode array includes, and metal interconnecting lines, for the electrical connection between an n-electrode the photodiode and an emitter electrode of the first heterojunction bipolar transistor and between a collector electrode of the first heterojunction bipolar transistor and an emitter electrode of the second heterojunction bipolar transistor are provided, the photodiode, the first heterojunction bipolar transistor u and the second heterojunction bipolar transistor is integrated as a monolithic chip on a semi-insulating InP substrate wafer. Accordingly, it is possible to simplify manufacturing processes, substantially increase the yield, and perform the ULSI (Ultra Large Scale Integration).