Micromechanical component i.e. inertial sensor, has micromechanical functional layer extending over specific percentage of substrate thickness perpendicular to main extension plane of substrate

摘要

The component (1) has a micromechanical functional layer that is formed in the material of a substrate (24), where the substrate has a main extension plane (11). The substrate and the micromechanical functional layer are provided in a plane that is arranged parallel to the main extension plane. The micromechanical functional layer extends over 30 percentage of the substrate thickness perpendicular to the main extension plane. The functional layer covers another layer in a direction perpendicular to the main extension plane. An independent claim is also included for a method for manufacturing a micromechanical component.