Micromechanical inertial sensor has substrate with main extension plane, and two functional layers which are arranged above one another parallel to main extension plane, where seismic mass is formed in functional layers

摘要

The micromechanical inertial sensor has a substrate with a main extension plane, and two functional layers (210,220) which are arranged above one another parallel to the main extension plane. A seismic mass is formed in the functional layers and is arranged over the substrate in a spaced manner. A tension spring unit (300) is connected with the substrate and with the seismic mass. The tension spring unit has a spring element (320) which is arranged in the latter functional layer.