Electron source on the basis of field emitters with minimized beam - emittance growth

摘要

It is a method and a system for limited emittance growth in an electron beam (28) discloses. The system (10) contains an emitter element (26), which is arranged so that, an electron beam (28), and creating an extraction electrode (28), the adjacent to the emitter element (26) is arranged to the electron beam (28) to extract from this. The system (10) also contains a net-like grids (32), which in the opening (24) of the extraction electrode (20) is arranged, in order to achieve an intensity and uniformity of an electrical field to a surface of the emitter element (26) to enhance, and a compensation emittance - - electrode (ece) (34), the adjacent to the net-like grids (32) on the side of the net-like grid (33) opposite to the emitter element (26) is positioned and which is set up, an emittance growth of the electron beam (28) to control.