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Poly silicon evaluation method. Poly silicon inspection in front of the direction and production of a thin film transistor
Poly silicon evaluation method. Poly silicon inspection in front of the direction and production of a thin film transistor
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机译:多晶硅评估方法。多晶硅检查的方向和薄膜晶体管的生产
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摘要
The state of a polysilicon film formed by excimer laser annealing an amorphous silicon film is to be evaluated. When the amorphous silicon film is annealed to form a polysilicon film, linearity or periodicity presents itself in the spatial structure of the film surface of the polysilicon film formed depending on the energy applied to the amorphous silicon during annealing. This linearity or periodicity is processed as an image and represented numerically from the image by exploiting the linearity or periodicity. The state of the polysilicon film is checked based on the numerical results.
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