METHOD FOR MANUFACTURING MASTER PLATE FOR MAKING STAMP FOR MICRO CONTACT PRINTING, MASTER PLATE FOR MAKING STAMP FOR MICRO CONTACT PRINTING, AND METHOD FOR MAKING STAMP FOR MICRO CONTACT PRINTING

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a master plate for making a stamp for micro contact printing (μCP), which is capable of making a stamp for μCP, allowing uniform pattern printing in a wide area, using a simple method.;SOLUTION: The method for manufacturing a master plate for making a stamp for micro contact printing includes: a light-shielding part forming step of using a substrate and forming a patterned light-shielding part on the substrate; a photosensitive resin film forming step of forming a photosensitive resin film, comprising a photosensitive resin on the substrate so as to cover the light-shielding part; an exposure step of subjecting the photosensitive resin film to pattern exposure by radiating light from the substrate side; and a developing step of developing the photosensitive resin film subjected to pattern exposure so as to pattern the photosensitive resin film.;COPYRIGHT: (C)2011,JPO&INPIT