Method of manufacturing micro-contact printing for stamp made for the master version, and micro-contact printing for stamp made for the master version

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a master plate for making a stamp for micro contact printing (μCP), which is capable of making a stamp for μCP, allowing uniform pattern printing in a wide area, using a simple method.;SOLUTION: The method for manufacturing a master plate for making a stamp for micro contact printing includes: a light-shielding part forming step of using a substrate and forming a patterned light-shielding part on the substrate; a photosensitive resin film forming step of forming a photosensitive resin film, comprising a photosensitive resin on the substrate so as to cover the light-shielding part; an exposure step of subjecting the photosensitive resin film to pattern exposure by radiating light from the substrate side; and a developing step of developing the photosensitive resin film subjected to pattern exposure so as to pattern the photosensitive resin film.;COPYRIGHT: (C)2011,JPO&INPIT