METHOD OF INTEGRATED TEST OF SEMICONDUCTOR AND SEMICONDUCTOR TESTING DEVICE

摘要

PROBLEM TO BE SOLVED: To integrate thermal resistance, surge, switching characteristic, and continuous operation tests of power semiconductor elements, and to perform the tests by the same testing device.;SOLUTION: A power supply section 1 supplies power to a DUT connection section 4 to which a DUT (a device to be tested) 3 is connected via a load section 2. The load section 2 uses induction loads, resistance loads, capacitance loads, passive loads of rectifying components, or the like, and switching devices (active loads) of transistors, or the like to impart required operating duty to each DUT 3. A DUT control-drive section 6 and a DUT characteristic measurement section 7 are connected to the DUT connection section 4. The DUT control-drive section 6 supplies prescribed voltage signals, current signals, or frequency signals to the DUT 3 to drive the DUT. The DUT characteristic measurement section 7 measures the electric and thermal characteristics by the values of current or voltage flowing in the DUT 3.;COPYRIGHT: (C)2010,JPO&INPIT