METHOD OF MANUFACTURING THIN-FILM SOLAR CELL, THIN-FILM SOLAR CELL MANUFACTURING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF PROCESSING FLEXIBLE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin-film solar cell that can lower the possibility that water etc., sticking on a flexible substrate enters a process atmosphere during a film forming process.;SOLUTION: A substrate processing apparatus 100 presses a processing member 160 which has unevenness on a surface and is heated against a surface of the flexible substrate 50 in a vacuum container. A heating roll 162 of the processing member 160 is heated and has unevenness on a surface. Consequently, unevenness is formed on the surface of the flexible substrate 50. Then a film forming apparatus forms a lower electrode on the surface of the flexible substrate. Then a next film forming apparatus forms a photoelectric conversion layer on the lower electrode. Further, a next film forming apparatus forms an upper electrode on the photoelectric conversion layer.;COPYRIGHT: (C)2010,JPO&INPIT