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SUBSTRATE LIFTING AND LOWERING APPARATUS AND SUBSTRATE PROCESSING AND TRANSFER SYSTEM
SUBSTRATE LIFTING AND LOWERING APPARATUS AND SUBSTRATE PROCESSING AND TRANSFER SYSTEM
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机译:基质提升放样装置以及基质加工和转移系统
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摘要
PROBLEM TO BE SOLVED: To fully reduce the planar space of a substrate lifting and lowering apparatus 7 and promote the effective use of space inside a plant.;SOLUTION: A first attitude-switching member 29, equipped with a first pose switch holding assembly 37, is set up on one side of first substrate processing apparatus 3 is arranged so that it can swing about a horizontal axis; a second pose switching member 49, equipped with a second pose switch holding assembly 41, is set up on one side of second substrate processing apparatus 5 so that it can swing about a horizontal axis; a no-end member 63 extended vertically is arranged in a holding frame 53 installed upright at one side of the first pose-switching member 29 so as to allow cyclical run; and multiple lift-holding assemblies 69 are fitted at intervals on the no-end member 63, in a circumferential direction.;COPYRIGHT: (C)2011,JPO&INPIT
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