REACTION FORCE PROCESSING MECHANISM, STAGE APPARATUS PROVIDED WITH THE SAME, AND SEMICONDUCTOR INSPECTION APPARATUS PROVIDED WITH THE STAGE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a downsized reaction force processing mechanism, a stage apparatus provided with the reaction force processing mechanism, and a semiconductor inspection apparatus provided with the stage apparatus.;SOLUTION: The reaction force processing mechanism 21 for processing reaction force applied to a plate 3 by the movement of an X axis stage 7 provided in the stage apparatus is provided with: a linear motor 26 for reaction processing which is provided with a magnet shaft 26A fixed to the plate 3 and a coil unit 26B connected to a rack and applies force to the plate 3; a first guide part 30 which is provided between the coil unit 26B and the plate 3 and guides the coil unit 26B in an X axis direction relative to the plate 3; and a transmission mechanism 27 which is provided between the coil unit 26B and the rack, and transmits the force in the X axis direction applied to the coil unit 26B to the rack.;COPYRIGHT: (C)2010,JPO&INPIT